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EXPERTISE

vacuum techniques.

Many high-tech systems, such as cryocoolers and electron microscopes, use vacuum to run their processes optimally without disturbance arising from unwanted heat load or contamination. A vacuum, especially in the ultra-high region, entails special challenges, such as outgassing, bearings, sealing, cooling and clean working. We draw on our cryogenics experience, develop (ultra-high) vacuum solutions for a wide variety of applications.

highlights

  • vacuum chamber / feed-through design
  • vacuum & cryo loading / load lock systems
  • vacuum system (LEM) modelling
  • cooling/heating systems that are (U)HV compatible

vacuum-compitable materials.

SEM, TEM and EUV, along with advanced (cryo)cooling and other high-tech applications, work with (ultra-high) vacuum. We apply our broad, thermal and mechatronics expertise for developing systems with (ultra-high) vacuums. We design effective seals and feed-throughs, have extensive knowledge of outgassing and vacuum-compatible materials, and can use cleanroom facilities for clean system assembly. With our dedicated test equipment, we accelerate the development of (ultra-)high vacuum solutions. Using our in-house Simulink LEM Toolbox development lets us simulate vacuum systems and predict their dynamic behavior.

Vacuum range vs vacuum techniques

"a broad track record."

“Cryogenics and vacuum technology go hand in hand. In cryogenics a vacuum is used to minimize parasitic heat load to the cooler so it is crucial for operating the system. As a specialist in cryogenics, we have a broad track record in designing and realizing vacuum systems. From vacuum (thermal) feed-throughs, RGA and vacuum safety systems to material vacuum compatibility and cryopumps. We’ve got you covered!”

all expertises.